Microchip Fabrication

Used for training, teaching, and vo-tech programs, and tailor-made for any semiconductor professional, Microchip Fabrication features a straightforward, math-free approach. And it details semiconductors from the inside out, covering science basics, its fascinating history, and the latest technical leap forward.

Inside, you'll follow semiconductors through every stage of fabrication. Testing, manufacturing processes, commercial integrated circuit types, and packaging are all explained in simple, nontechnical language.

Along the way, Van Zant introduces challenging quizzes and review summaries that make Microchip Fabrication an ideal text or self-study guide. By the time you've finished this informative "guided tour," you'll have a solid working knowledge of all the important issues and processes, materials and methods involved in semiconductor technology, whether on the sub-atomic level or in the context of large-scale industrial practices.

Table of contents

Chapter 1: The Semiconductor Industry
Chapter 2: Semiconductor Materials and Process Chemicals
Chapter 3: Manufacturing Wafers
Chapter 4: Overview of Wafer Fabrication
Chapter 5: Contamincation Control
Chapter 6: Process Yields
Chapter 7: Oxidation
Chapter 8: Basic Patterning - Surface Preparation to Exposure
Chapter 9: Basic Patterning - Developing to Final Inspection
Chapter 10: Advanced Photolithography Processes
Chapter 11: Doping
Chapter 12: Deposition
Chapter 13: Metallization
Chapter 14: Process and Device Evaluation
Chapter 15: The Business of Wafer Fabrication
Chapter 16: Semiconductor Devices and Integrated Circuit Formation
Chapter 17: Integrated Circuit Types
Chapter 18: Packaging
Index