Mechanical sensors

Stephen Beeby, Graham Ensell, Michael Kraft, Neil White - Collection Microelectromechanical systems series

270 pages, parution le 18/06/2004

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Résumé

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

This new resource explores all the major areas of mechanical microsensors and takes an especially close look at pressure and inertial sensors. Engineers in industry and academia can tap into current and future market trends in such key applications areas for mechanical microsensors as force and torque, flow in microfluidics, and displacement. A thorough introduction to physical sensors, MEMS, and the properties of silicon brings you up to speed with the state of the art of this groundbreaking technology.

Sommaire

Materials and Fabrication Techniques
Design Tools
Packaging
Physical Sensing Techniques
Pressure Sensors
Force and Torque Sensors
Inertial Sensors
Flow Sensors for Microfluidics
Displacement Sensors

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	PAPIER
Éditeur(s)	Artech House
Auteur(s)	Stephen Beeby, Graham Ensell, Michael Kraft, Neil White
Collection	Microelectromechanical systems series
Parution	18/06/2004
Nb. de pages	270
Format	18 x 26
Couverture	Relié
Poids	640g
Intérieur	Noir et Blanc
EAN13	9781580535366
ISBN13	978-1-58053-536-6